Thermal Behavior of Biaxial Piezoelectric MEMS-Scanners

Thermal Behavior of Biaxial Piezoelectric MEMS-Scanners

This paper presents the thermal behavior of non-resonant (quasi-static) piezoelectric biaxial MEMS scanners with Bragg reflectors. These scanners were developed for LIDAR (LIght Detection And Ranging) applications using a pulsed 1550 nm laser with an average power of 2 W. At this power, a standard m...

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Bibliographic Details
Main Authors: Laurent Mollard, Christel Dieppedale, Antoine Hamelin, Gwenael Le Rhun, Jean Hue, Laurent Frey, Gael Castellan
Format: Article
Language:English
Published: MDPI AG 2023-11-01
Series:Sensors
Subjects:
thermal behavior
2D MEMS mirror
piezoelectric
Bragg reflector
high optical power management
Online Access:https://www.mdpi.com/1424-8220/23/23/9538

Internet

https://www.mdpi.com/1424-8220/23/23/9538

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