Electroless-deposition of epitaxial (111)-oriented silver on nanotwinned copper microbumps for metal direct bonding
A large lattice mismatch between Ag and Cu commonly results in incoherently polycrystalline deposited features. It is very challenging to epitaxially deposit an Ag film on Cu. In this study, an epitaxial Ag film was electroless-deposited on nanotwinned Cu (NT-Cu) microbumps. Although the Ag/Cu large...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2023-11-01
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Series: | Journal of Materials Research and Technology |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785423030144 |