Post-growth enhancement of CVD-grown hexagonal boron nitride films on sapphire
This study explores the effect of post-growth annealing on hexagonal boron nitride (hBN) films grown on c-sapphire substrates by chemical vapor deposition as post-growth annealing proves to overcome the equipment limitations of commercial thermal CVD systems and offers a simplistic way to enhance th...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2022-12-01
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Series: | Results in Materials |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2590048X22000875 |