Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor
Micro-Cantilever (MCL) is a thin film structure that is applied for aerosol particle mass sensing. Several modifications to the rectangular MCL (length-to-width ratio, slots at the anchor, serrations at its side edges) are made to deduce the role and influence of the shape of rectangular MCL-based a...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-01-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/3/626 |