Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor
Micro-Cantilever (MCL) is a thin film structure that is applied for aerosol particle mass sensing. Several modifications to the rectangular MCL (length-to-width ratio, slots at the anchor, serrations at its side edges) are made to deduce the role and influence of the shape of rectangular MCL-based a...
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MDPI AG
2020-01-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/20/3/626 |
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| author | Feng Xu Yuliang Wei Shiyuan Bian Huanqin Wang Da-Ren Chen Deyi Kong |
| author_facet | Feng Xu Yuliang Wei Shiyuan Bian Huanqin Wang Da-Ren Chen Deyi Kong |
| author_sort | Feng Xu |
| collection | DOAJ |
| description | Micro-Cantilever (MCL) is a thin film structure that is applied for aerosol particle mass sensing. Several modifications to the rectangular MCL (length-to-width ratio, slots at the anchor, serrations at its side edges) are made to deduce the role and influence of the shape of rectangular MCL-based aerosol mass sensors and reduce gas damping. A finite element fluid-structure interaction model was used to investigate the performance of MCL. It is found that (I) the mass sensitivity and quality factor decline with the increasing of length-to-width ratio which alters the resonant frequency of the MCL. The optimum conditions, including the length-to-width ratio (<i>σ<sub>lw</sub></i> = 5) and resonant frequency (<i>f</i><sub>0</sub> = 540.7 kHz) of the MCL, are obtained with the constant surface area (<i>S</i> = 45,000 μm<sup>2</sup>) in the frequency domain ranging from 0 to 600 kHz. (II) The slots can enhance the read-out signal and bring a small Q factor drop. (III) The edge serrations on MCL significantly reduce the gas damping. The results provide a reference for the design of aerosol mass sensor, which makes it possible to develop aerosol mass sensor with high frequency, sensitivity, and quality. |
| first_indexed | 2024-04-11T21:47:21Z |
| format | Article |
| id | doaj.art-09d27f76296346c2a5d3e98a04e1f3d4 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T21:47:21Z |
| publishDate | 2020-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-09d27f76296346c2a5d3e98a04e1f3d42022-12-22T04:01:23ZengMDPI AGSensors1424-82202020-01-0120362610.3390/s20030626s20030626Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass SensorFeng Xu0Yuliang Wei1Shiyuan Bian2Huanqin Wang3Da-Ren Chen4Deyi Kong5State Key Laboratory of Transducer Technology, Key Laboratory of Biomimetic Sensing and Advanced Robot Technology of Anhui Province, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, ChinaState Key Laboratory of Transducer Technology, Key Laboratory of Biomimetic Sensing and Advanced Robot Technology of Anhui Province, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, ChinaState Key Laboratory of Transducer Technology, Key Laboratory of Biomimetic Sensing and Advanced Robot Technology of Anhui Province, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, ChinaState Key Laboratory of Transducer Technology, Key Laboratory of Biomimetic Sensing and Advanced Robot Technology of Anhui Province, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, ChinaParticle Laboratory, Department of Mechanical and Nuclear Engineering, Virginia Commonwealth University, 401 West Main Street, Richmond, VA 23220, USAState Key Laboratory of Transducer Technology, Key Laboratory of Biomimetic Sensing and Advanced Robot Technology of Anhui Province, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, ChinaMicro-Cantilever (MCL) is a thin film structure that is applied for aerosol particle mass sensing. Several modifications to the rectangular MCL (length-to-width ratio, slots at the anchor, serrations at its side edges) are made to deduce the role and influence of the shape of rectangular MCL-based aerosol mass sensors and reduce gas damping. A finite element fluid-structure interaction model was used to investigate the performance of MCL. It is found that (I) the mass sensitivity and quality factor decline with the increasing of length-to-width ratio which alters the resonant frequency of the MCL. The optimum conditions, including the length-to-width ratio (<i>σ<sub>lw</sub></i> = 5) and resonant frequency (<i>f</i><sub>0</sub> = 540.7 kHz) of the MCL, are obtained with the constant surface area (<i>S</i> = 45,000 μm<sup>2</sup>) in the frequency domain ranging from 0 to 600 kHz. (II) The slots can enhance the read-out signal and bring a small Q factor drop. (III) The edge serrations on MCL significantly reduce the gas damping. The results provide a reference for the design of aerosol mass sensor, which makes it possible to develop aerosol mass sensor with high frequency, sensitivity, and quality.https://www.mdpi.com/1424-8220/20/3/626micro-cantileveraerosol mass sensorlength to width ratioslotedge serrationfluid-structure interaction |
| spellingShingle | Feng Xu Yuliang Wei Shiyuan Bian Huanqin Wang Da-Ren Chen Deyi Kong Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor Sensors micro-cantilever aerosol mass sensor length to width ratio slot edge serration fluid-structure interaction |
| title | Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor |
| title_full | Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor |
| title_fullStr | Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor |
| title_full_unstemmed | Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor |
| title_short | Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor |
| title_sort | simulation based design and optimization of rectangular micro cantilever based aerosols mass sensor |
| topic | micro-cantilever aerosol mass sensor length to width ratio slot edge serration fluid-structure interaction |
| url | https://www.mdpi.com/1424-8220/20/3/626 |
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