Two-dimensional analytical description of the plasma potential in a magnetron discharge
Abstract Simple analytical formulas are proposed to describe the plasma potential in a steady-state magnetron discharge, based on the results of various experiments and numerical simulations reported in the literature. The description is two-dimensional (2D), covering two main regions, the cathode s...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2023-09-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-023-42949-7 |