Two-dimensional analytical description of the plasma potential in a magnetron discharge
Abstract Simple analytical formulas are proposed to describe the plasma potential in a steady-state magnetron discharge, based on the results of various experiments and numerical simulations reported in the literature. The description is two-dimensional (2D), covering two main regions, the cathode s...
| Prif Awduron: | , |
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| Fformat: | Erthygl |
| Iaith: | English |
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Nature Portfolio
2023-09-01
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| Cyfres: | Scientific Reports |
| Mynediad Ar-lein: | https://doi.org/10.1038/s41598-023-42949-7 |