Sequential and Comprehensive Algorithm for Fault Detection in Semiconductor Sensors
The semiconductor manufacturing processes have been evolved to improve the yield rate. Here, we studied a sequential and comprehensive algorithm that could be used for fault detection and classification (FDC) of the semiconductor chips. A statistical process control (SPC) method is employed for insp...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-11-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/21/10419 |