Machine-learning-assisted analysis of transition metal dichalcogenide thin-film growth
Abstract In situ reflective high-energy electron diffraction (RHEED) is widely used to monitor the surface crystalline state during thin-film growth by molecular beam epitaxy (MBE) and pulsed laser deposition. With the recent development of machine learning (ML), ML-assisted analysis of RHEED videos...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2023-02-01
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Series: | Nano Convergence |
Subjects: | |
Online Access: | https://doi.org/10.1186/s40580-023-00359-5 |