A Self-Test, Self-Calibration and Self-Repair Methodology of Thermopile Infrared Detector

To improve the reliability and yield of thermopile infrared detectors, a self-test, self-calibration and self-repair methodology is proposed in this paper. A novel micro-electro-mechanical system (MEMS) infrared thermopile detector structure is designed in this method with a heating resistor buildin...

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Bibliographic Details
Main Authors: Kaiyue Zhou, Jia Li, Weibing Wang, Dapeng Chen
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Electronics
Subjects:
Online Access:https://www.mdpi.com/2079-9292/10/10/1167