A Self-Test, Self-Calibration and Self-Repair Methodology of Thermopile Infrared Detector
To improve the reliability and yield of thermopile infrared detectors, a self-test, self-calibration and self-repair methodology is proposed in this paper. A novel micro-electro-mechanical system (MEMS) infrared thermopile detector structure is designed in this method with a heating resistor buildin...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-05-01
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Series: | Electronics |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-9292/10/10/1167 |