A New Framework of the EAP System in Semiconductor Manufacturing Internet of Things
In modern semiconductor manufacturing, the computer-integrated manufacturing system plays an essential role in automation with plenty of software systems. Among them, the <i>equipment automation program</i> (EAP) is one of the fundamental systems to support the interconnection of various...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-09-01
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| Series: | Electronics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-9292/12/18/3910 |