Hollow polydimethylsiloxane (PDMS) foam with a 3D interconnected network for highly sensitive capacitive pressure sensors
Abstract We propose a highly sensitive capacitive pressure sensor made of hollow polydimethylsiloxane (PDMS) foam with a three-dimensional network structure. The stiffness of the foam is adjusted by the viscosity of the PDMS solution. The fabricated PDMS-30 (PDMS 30 wt%) foam shows extremely high po...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2020-12-01
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Series: | Micro and Nano Systems Letters |
Subjects: | |
Online Access: | https://doi.org/10.1186/s40486-020-00127-8 |