Mode Optimization of Microelectromechanical-System Traveling-Wave Ultrasonic Motor Based on Kirigami
High-quality traveling waves in stators are critical for traveling-wave ultrasonic motors (TUSMs) to achieve good stability and efficiency. However, the modal splitting and shape distortion that is induced by the anisotropic elasticity induce severe traveling wave distortion. In this study, mode opt...
| 主要な著者: | , , , , |
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| フォーマット: | 論文 |
| 言語: | English |
| 出版事項: |
MDPI AG
2025-02-01
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| シリーズ: | Micromachines |
| 主題: | |
| オンライン･アクセス: | https://www.mdpi.com/2072-666X/16/2/239 |