Structure and morphology of nano-sized W-Ti/Si thin films

Structure and morphology of nano-sized W-Ti/Si thin films

Thin films were deposited by d.c. sputtering onto a silicon substrate. The influence of the W-Ti thin film thickness to its structural and morphological characteristics of a nano-scale were studied. The phase composition and grain size were studied by X-ray diffraction (XRD), while the surface morph...

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Bibliographic Details
Main Authors: Petrović Suzana M., Adnađević Borivoje, Peruško Davor, Popović Nada, Bundaleski Nenad, Radović Milan, Gaković Biljana, Rakočević Zlatko
Format: Article
Language:English
Published: Serbian Chemical Society 2006-01-01
Series:Journal of the Serbian Chemical Society
Subjects:
pvdw-ti thin film
scanning tunneling microscopy (stm)
low energy ions scattering (leis)
x-ray diffraction (xrd)
Online Access:http://www.doiserbia.nb.rs/img/doi/0352-5139/2006/0352-51390609969P.pdf

Internet

http://www.doiserbia.nb.rs/img/doi/0352-5139/2006/0352-51390609969P.pdf

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