Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures

Automated Filling of Dry Micron-Sized Particles into Micro Mold Pattern within Planar Substrates for the Fabrication of Powder-Based 3D Microstructures

Powder-based techniques are gaining increasing interest for the fabrication of microstructures on planar substrates. A typical approach comprises the filling of a mold pattern with micron-sized particles of the desired material, and their fixation there. Commonly powder-loaded pastes or inks are fil...

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Bibliographic Details
Main Authors: Cris Kostmann, Thomas Lisec, Mani Teja Bodduluri, Olaf Andersen
Format: Article
Language:English
Published: MDPI AG 2021-09-01
Series:Micromachines
Subjects:
3D microstructures
MEMS
particle packing
ultrasound
NdFeB micromagnets
Online Access:https://www.mdpi.com/2072-666X/12/10/1176

Internet

https://www.mdpi.com/2072-666X/12/10/1176

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