Experimental Setup for Dynamic Analysis of Micro- and Nano-Mechanical Systems in Vacuum, Gas, and Liquid

Experimental Setup for Dynamic Analysis of Micro- and Nano-Mechanical Systems in Vacuum, Gas, and Liquid

An experimental setup to perform dynamic analysis of a micro- and nano-mechanical system in vacuum, gas, and liquid is presented. The setup mainly consists of a piezoelectric excitation part and the chamber that can be either evacuated for vacuum, or filled with gas or water. The design of the piezo...

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Bibliographic Details
Main Authors: Bram van den Brink, Farbod Alijani, Murali Krishna Ghatkesar
Format: Article
Language:English
Published: MDPI AG 2019-02-01
Series:Micromachines
Subjects:
modal testing
experimental modal analysis
microsystems
micro-cantilevers
liquid
fluid
vacuum
dynamics
vibration analysis
AFM
Atomic Force Microscopy
vibration
Online Access:https://www.mdpi.com/2072-666X/10/3/162

Internet

https://www.mdpi.com/2072-666X/10/3/162

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