Modification of the Scharfetter–Gummel method for calculating the flux of charged particles for simulation of a radio-frequency capacitive coupled discharge
A numerical method of solving of nonstationary convection-diffusion equation for charged particle densities in capacitive coupled RF discharge is presented. The method allows us to calculate the particle concentration together with the flux density simultaneously at very rapid changes of particle de...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Kazan Federal University
2017-12-01
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| Series: | Учёные записки Казанского университета: Серия Физико-математические науки |
| Subjects: | |
| Online Access: | https://kpfu.ru/portal/docs/F_2054167321/159_4_phys_mat_1.pdf |