Design and Characterization of a Novel Biaxial Bionic Hair Flow Sensor Based on Resonant Sensing
This paper presents the design, theoretical analysis, simulation verification, fabrication and prototype characterization of a novel biaxial bionic hair flow sensor based on resonant sensing. Firstly, the device architecture, mainly consists of a polymer hair post, a silicon micro signal transducer...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-08-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/16/4483 |