The Nonlinear Dynamics of a MEMS Resonator with a Triangular Tuning Comb

The Nonlinear Dynamics of a MEMS Resonator with a Triangular Tuning Comb

The nonlinear dynamic response of a MEMS resonator with a triangular tuning comb is studied. The motion equation with dis-smooth tuning electrostatic force is derived according to Newton’s second law. The analytical solution of the periodic response is obtained using the harmonic balance method and...

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Bibliographic Details
Main Authors: Lijuan Zhang, Huabiao Zhang, Xinye Li, Ningguo Qiao, Xianping Gao, Yunxiao Ji
Format: Article
Language:English
Published: MDPI AG 2023-11-01
Series:Micromachines
Subjects:
nonlinear dynamics
MEMS resonator
triangular tuning comb
periodic solution
dis-smooth tuning force
Online Access:https://www.mdpi.com/2072-666X/14/11/2109

Internet

https://www.mdpi.com/2072-666X/14/11/2109

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