A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide

We report on thermal and evanescent field sensing from a tellurium oxide optical microcavity resonator on a silicon photonics platform. The on-chip resonator structure is fabricated using silicon-photonics-compatible processing steps and consists of a silicon-on-insulator waveguide next to a circula...

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Bibliographic Details
Main Authors: Henry C. Frankis, Daniel Su, Dawson B. Bonneville, Jonathan D. B. Bradley
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/18/11/4061