Femtosecond Laser Machining of an X-ray Mask in a 500 Micron-Thick Tungsten Sheet
Femtosecond laser material processing (FLMP) was used to make an X-ray mask in a 500 µm thick tungsten sheet without the use of any chemical etch methods. The laser produced an 800 nm wavelength at a 1 kHz repetition rate and a pulse width of 100 fs. The laser beam arrival at the tungsten sheet was...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-11-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/14/11/2071 |