Investigation of the Eigen Frequency of a Cantilever Microbeam Immersed in a Fluid Under the Piezoelectric Effect

In this paper, a new model of piezoelectric cantilever is developed, it can be heavily used in a micro electromechanical system (MEMS). This new prototype eliminates several risks caused by the previous means already used and increases the sensation in terms of rheology. Our approach is based on the...

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Bibliographic Details
Main Authors: Victory ELIAS, Flavie BRAUD, Philippe CHAMPAGNE, Georges NASSAR
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2021-12-01
Series:Sensors & Transducers
Subjects:
Online Access:https://sensorsportal.com/HTML/DIGEST/december_2021/Vol_254/P_3249.pdf