Microwave Impedance Measurement for Nanoelectronics
The rapid progress in nanoelectronics showed an urgent need for microwave measurement of impedances extremely different from the 50Ω reference impedance of measurement instruments. In commonly used methods input impedance or admittance of a device under test (DUT) is derived from measured value of i...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
Spolecnost pro radioelektronicke inzenyrstvi
2011-04-01
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Series: | Radioengineering |
Subjects: | |
Online Access: | http://www.radioeng.cz/fulltexts/2011/11_01_276_283.pdf |