Design of a beam line for simultaneous dual-beam ion implantation
For over 50 years, various ion beam facilities have been utilized to simulate the irradiation effect of neutrons on relevant nuclear materials. However, due to the limitation of single ion beam irradiation, the injection of H2+ and He+ into the sample coaxially is necessary to observe the synergy of...
| Những tác giả chính: | , , , , , , , , , , , , , , , |
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| Định dạng: | Bài viết |
| Ngôn ngữ: | English |
| Được phát hành: |
AIP Publishing LLC
2023-07-01
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| Loạt: | AIP Advances |
| Truy cập trực tuyến: | http://dx.doi.org/10.1063/5.0144431 |