Design of a beam line for simultaneous dual-beam ion implantation

Design of a beam line for simultaneous dual-beam ion implantation

For over 50 years, various ion beam facilities have been utilized to simulate the irradiation effect of neutrons on relevant nuclear materials. However, due to the limitation of single ion beam irradiation, the injection of H2+ and He+ into the sample coaxially is necessary to observe the synergy of...

Full description

Bibliographic Details
Main Authors: Shixian Cai, Kedong Wang, Wei Huang, Kai Wang, Matthew J. Easton, Jie Li, Caijie Zhang, Tingru Zhu, Hao Wang, Huilin Ge, Xicheng Xie, Haoyang Lan, Yingjie Li, Guohui Wei, Kun Zhu, Xueqing Yan
Format: Article
Language:English
Published: AIP Publishing LLC 2023-07-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/5.0144431

Internet

http://dx.doi.org/10.1063/5.0144431

Similar Items