TECHNOLOGY ROADMAP FOR DEVELOPMENT OF SIC SENSORS AT PLASMA PROCESSES LABORATORY. doi: 10.5028/jatm.2010.02027210

Recognizing the need to consolidate the research and development (R&D) activities in microelectronics fields in a strategic manner, the Plasma Processes Laboratory of the Technological Institute of Aeronautics (LPP-ITA) has established a technology roadmap to serve as a guide for activities...

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Bibliographic Details
Main Authors: Mariana Amorim Fraga, Rodrigo Sávio Pessoa, Homero Maciel Santiago Maciel, Marcos Massi, Ivo de Castro Oliveira
Format: Article
Language:English
Published: Instituto de Aeronáutica e Espaço (IAE) 2011-07-01
Series:Journal of Aerospace Technology and Management
Subjects:
Online Access:https://www.jatm.com.br/jatm/article/view/59