Wafer Surface Reconstruction Based on Shape From Focus
Scanning electron microscope, atomic force microscope and other equipment play an important role in the fields of topography restoration and detection. However, these devices are generally used in nanometer-scale measurement scenarios. For wafer topography quality control scenarios ranging from micr...
| Հիմնական հեղինակներ: | , , , |
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| Ձևաչափ: | Հոդված |
| Լեզու: | English |
| Հրապարակվել է: |
IEEE
2024-01-01
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| Շարք: | IEEE Access |
| Խորագրեր: | |
| Առցանց հասանելիություն: | https://ieeexplore.ieee.org/document/10433512/ |