Machine Learning-Based Figure of Merit Model of SIPOS Modulated Drift Region for U-MOSFET

Machine Learning-Based Figure of Merit Model of SIPOS Modulated Drift Region for U-MOSFET

This paper presents a machine learning-based figure of merit model for superjunction (SJ) U-MOSFET (SSJ-UMOS) with a modulated drift region utilizing semi-insulating poly-crystalline silicon (SIPOS) pillars. This SJ drift region modulation is achieved through SIPOS pillars beneath the trench gate, f...

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Bibliographic Details
Main Authors: Zhen Cao, Qi Sun, Chuanfeng Ma, Biao Hou, Licheng Jiao
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Micromachines
Subjects:
superjunction
UMOSFET
machine learning
Silicon limit
Online Access:https://www.mdpi.com/2072-666X/15/3/411

Internet

https://www.mdpi.com/2072-666X/15/3/411

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