Deposition of ultrananocrystalline diamond at low temperature using CO, CH4 mixed carbon source
UNCD (Ultrananocrystalline diamond) is a material with various excellent properties, but the high deposition temperature limits its application. UNCD was deposited at low temperature (700 K) using CO–CH4–H2-Ar as gas source. CO as reaction gas reduces the activation energy of CH4 system. The effects...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Results in Materials |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590048X21000704 |