XPS Investigation of the Oxidation States of the As-Deposited Ta Films Prepared by Magnetron Sputtering Technology

XPS Investigation of the Oxidation States of the As-Deposited Ta Films Prepared by Magnetron Sputtering Technology

Due to their versatile and unique properties, tantalum-based thin films have been extensively studied. However, tantalum is susceptible to oxidation due to its higher chemical activity, which is crucial regardless of whether oxidations of Ta are beneficial or detrimental. Therefore, the oxidation of...

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Bibliographic Details
Main Authors: Ming Hu, Zhaowang Li, Xiaoming Gao, Dong Jiang, Zhilu Liu, Longbang Guo, Xu Zhao, Jun He, Jiayi Sun, Lijun Weng, Desheng Wang
Format: Article
Language:English
Published: MDPI AG 2023-11-01
Series:Materials
Subjects:
sputtering Ta film
XPS analysis
oxidation state
Online Access:https://www.mdpi.com/1996-1944/16/23/7405

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https://www.mdpi.com/1996-1944/16/23/7405

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