Preparative Methods for Nanoanalysis of Materials with Focused Ion Beam Instruments
Over the past 15 years, with materials research moving into sub-micrometer-dimensions, focused ion beam instruments (FIB) have proven to be a versatile tool to prepare samples for nanoanalysis. Especially advanced dual-beam FIBs, i.e. FIBs with a combination of an ion and electron column,...
| Main Authors: | , , |
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| Format: | Article |
| Language: | deu |
| Published: |
Swiss Chemical Society
2006-11-01
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| Series: | CHIMIA |
| Subjects: | |
| Online Access: | https://chimia.ch/chimia/article/view/4239 |