Preparative Methods for Nanoanalysis of Materials with Focused Ion Beam Instruments
Over the past 15 years, with materials research moving into sub-micrometer-dimensions, focused ion beam instruments (FIB) have proven to be a versatile tool to prepare samples for nanoanalysis. Especially advanced dual-beam FIBs, i.e. FIBs with a combination of an ion and electron column,...
| Main Authors: | , , |
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| Format: | Article |
| Language: | deu |
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Swiss Chemical Society
2006-11-01
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| Series: | CHIMIA |
| Subjects: | |
| Online Access: | https://chimia.ch/chimia/article/view/4239 |
| _version_ | 1797987476859518976 |
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| author | Philipp M. Nellen Victor Callegari Urs Sennhauser |
| author_facet | Philipp M. Nellen Victor Callegari Urs Sennhauser |
| author_sort | Philipp M. Nellen |
| collection | DOAJ |
| description |
Over the past 15 years, with materials research moving into sub-micrometer-dimensions, focused ion beam instruments (FIB) have proven to be a versatile tool to prepare samples for nanoanalysis. Especially advanced dual-beam FIBs, i.e. FIBs with a combination of an ion and electron
column, take advantage of their particular features for imaging and preparation. This article discusses the principle of ion beam sample interaction to demonstrate how samples are prepared and what kind of possible sample damage and artifacts may occur. Typical FIB instrumentation is also
addressed. Finally progress in FIB preparative methods for nanoanalysis of materials and also the common pitfalls to be avoided are discussed.
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| first_indexed | 2024-04-11T07:47:56Z |
| format | Article |
| id | doaj.art-0db558fc34334bc2804ae9c40234bcc9 |
| institution | Directory Open Access Journal |
| issn | 0009-4293 2673-2424 |
| language | deu |
| last_indexed | 2024-04-11T07:47:56Z |
| publishDate | 2006-11-01 |
| publisher | Swiss Chemical Society |
| record_format | Article |
| series | CHIMIA |
| spelling | doaj.art-0db558fc34334bc2804ae9c40234bcc92022-12-22T04:36:10ZdeuSwiss Chemical SocietyCHIMIA0009-42932673-24242006-11-01601110.2533/chimia.2006.735Preparative Methods for Nanoanalysis of Materials with Focused Ion Beam InstrumentsPhilipp M. NellenVictor CallegariUrs Sennhauser Over the past 15 years, with materials research moving into sub-micrometer-dimensions, focused ion beam instruments (FIB) have proven to be a versatile tool to prepare samples for nanoanalysis. Especially advanced dual-beam FIBs, i.e. FIBs with a combination of an ion and electron column, take advantage of their particular features for imaging and preparation. This article discusses the principle of ion beam sample interaction to demonstrate how samples are prepared and what kind of possible sample damage and artifacts may occur. Typical FIB instrumentation is also addressed. Finally progress in FIB preparative methods for nanoanalysis of materials and also the common pitfalls to be avoided are discussed. https://chimia.ch/chimia/article/view/4239Focused ion beamNanoanalysisPreparative tool |
| spellingShingle | Philipp M. Nellen Victor Callegari Urs Sennhauser Preparative Methods for Nanoanalysis of Materials with Focused Ion Beam Instruments CHIMIA Focused ion beam Nanoanalysis Preparative tool |
| title | Preparative Methods for Nanoanalysis of Materials with Focused Ion Beam Instruments |
| title_full | Preparative Methods for Nanoanalysis of Materials with Focused Ion Beam Instruments |
| title_fullStr | Preparative Methods for Nanoanalysis of Materials with Focused Ion Beam Instruments |
| title_full_unstemmed | Preparative Methods for Nanoanalysis of Materials with Focused Ion Beam Instruments |
| title_short | Preparative Methods for Nanoanalysis of Materials with Focused Ion Beam Instruments |
| title_sort | preparative methods for nanoanalysis of materials with focused ion beam instruments |
| topic | Focused ion beam Nanoanalysis Preparative tool |
| url | https://chimia.ch/chimia/article/view/4239 |
| work_keys_str_mv | AT philippmnellen preparativemethodsfornanoanalysisofmaterialswithfocusedionbeaminstruments AT victorcallegari preparativemethodsfornanoanalysisofmaterialswithfocusedionbeaminstruments AT urssennhauser preparativemethodsfornanoanalysisofmaterialswithfocusedionbeaminstruments |