Preparative Methods for Nanoanalysis of Materials with Focused Ion Beam Instruments

Preparative Methods for Nanoanalysis of Materials with Focused Ion Beam Instruments

Over the past 15 years, with materials research moving into sub-micrometer-dimensions, focused ion beam instruments (FIB) have proven to be a versatile tool to prepare samples for nanoanalysis. Especially advanced dual-beam FIBs, i.e. FIBs with a combination of an ion and electron column,...

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Bibliographic Details
Main Authors: Philipp M. Nellen, Victor Callegari, Urs Sennhauser
Format: Article
Language:deu
Published: Swiss Chemical Society 2006-11-01
Series:CHIMIA
Subjects:
Focused ion beam
Nanoanalysis
Preparative tool
Online Access:https://chimia.ch/chimia/article/view/4239

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