An Experimental and Theoretical Study of Impact of Device Parameters on Performance of AlN/Sapphire-Based SAW Temperature Sensors

An Experimental and Theoretical Study of Impact of Device Parameters on Performance of AlN/Sapphire-Based SAW Temperature Sensors

The impact of device parameters, including AlN film thickness (<i>h</i><sub>AlN</sub>), number of interdigital transducers (<i>N</i><sub>IDT</sub>), and acoustic propagation direction, on the performance of <i>c</i>-plane AlN/sapphire-based...

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Bibliographic Details
Main Authors: Hongrui Lv, Yinglong Huang, Yujie Ai, Zhe Liu, Defeng Lin, Zhe Cheng, Lifang Jia, Bingliang Guo, Boyu Dong, Yun Zhang
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Micromachines
Subjects:
AlN film
surface acoustic wave
temperature sensor
acoustic propagation direction
temperature coefficient of frequency
quality factor
Online Access:https://www.mdpi.com/2072-666X/13/1/40

Internet

https://www.mdpi.com/2072-666X/13/1/40

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