Microcantilever-integrated photonic circuits for broadband laser beam scanning

Abstract Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and...

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Bibliographic Details
Main Authors: Saeed Sharif Azadeh, Jason C. C. Mak, Hong Chen, Xianshu Luo, Fu-Der Chen, Hongyao Chua, Frank Weiss, Christopher Alexiev, Andrei Stalmashonak, Youngho Jung, John N. Straguzzi, Guo-Qiang Lo, Wesley D. Sacher, Joyce K. S. Poon
Format: Article
Language:English
Published: Nature Portfolio 2023-05-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-023-38260-8