Microcantilever-integrated photonic circuits for broadband laser beam scanning
Abstract Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and...
Main Authors: | , , , , , , , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2023-05-01
|
Series: | Nature Communications |
Online Access: | https://doi.org/10.1038/s41467-023-38260-8 |