Microcantilever-integrated photonic circuits for broadband laser beam scanning
Abstract Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and...
| Main Authors: | , , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2023-05-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-023-38260-8 |
| _version_ | 1797827419854340096 |
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| author | Saeed Sharif Azadeh Jason C. C. Mak Hong Chen Xianshu Luo Fu-Der Chen Hongyao Chua Frank Weiss Christopher Alexiev Andrei Stalmashonak Youngho Jung John N. Straguzzi Guo-Qiang Lo Wesley D. Sacher Joyce K. S. Poon |
| author_facet | Saeed Sharif Azadeh Jason C. C. Mak Hong Chen Xianshu Luo Fu-Der Chen Hongyao Chua Frank Weiss Christopher Alexiev Andrei Stalmashonak Youngho Jung John N. Straguzzi Guo-Qiang Lo Wesley D. Sacher Joyce K. S. Poon |
| author_sort | Saeed Sharif Azadeh |
| collection | DOAJ |
| description | Abstract Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint, broad wavelength operation, and low power consumption. Here, we introduce a laser beam scanner that meets these requirements. Using microcantilevers embedded with silicon nitride nanophotonic circuitry, we demonstrate broadband, one- and two-dimensional steering of light with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact ~0.1 mm2 areas, consume ~31 to 46 mW of power, are simple to control, and emit a single light beam. The microcantilevers are monolithically integrated in an active photonic platform on 200-mm silicon wafers. The microcantilever-integrated photonic circuits miniaturize and simplify light projectors to enable versatile, power-efficient, and broadband laser scanner microchips. |
| first_indexed | 2024-04-09T12:48:00Z |
| format | Article |
| id | doaj.art-0dfb6ec9e0b2468eb86779e5377af2b9 |
| institution | Directory Open Access Journal |
| issn | 2041-1723 |
| language | English |
| last_indexed | 2024-04-09T12:48:00Z |
| publishDate | 2023-05-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Nature Communications |
| spelling | doaj.art-0dfb6ec9e0b2468eb86779e5377af2b92023-05-14T11:21:57ZengNature PortfolioNature Communications2041-17232023-05-011411810.1038/s41467-023-38260-8Microcantilever-integrated photonic circuits for broadband laser beam scanningSaeed Sharif Azadeh0Jason C. C. Mak1Hong Chen2Xianshu Luo3Fu-Der Chen4Hongyao Chua5Frank Weiss6Christopher Alexiev7Andrei Stalmashonak8Youngho Jung9John N. Straguzzi10Guo-Qiang Lo11Wesley D. Sacher12Joyce K. S. Poon13Max Planck Institute of Microstructure PhysicsUniversity of Toronto, Department of Electrical and Computer EngineeringMax Planck Institute of Microstructure PhysicsAdvanced Micro Foundry Pte. Ltd.Max Planck Institute of Microstructure PhysicsAdvanced Micro Foundry Pte. Ltd.Max Planck Institute of Microstructure PhysicsUniversity of Toronto, Department of Electrical and Computer EngineeringMax Planck Institute of Microstructure PhysicsMax Planck Institute of Microstructure PhysicsMax Planck Institute of Microstructure PhysicsAdvanced Micro Foundry Pte. Ltd.Max Planck Institute of Microstructure PhysicsMax Planck Institute of Microstructure PhysicsAbstract Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint, broad wavelength operation, and low power consumption. Here, we introduce a laser beam scanner that meets these requirements. Using microcantilevers embedded with silicon nitride nanophotonic circuitry, we demonstrate broadband, one- and two-dimensional steering of light with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact ~0.1 mm2 areas, consume ~31 to 46 mW of power, are simple to control, and emit a single light beam. The microcantilevers are monolithically integrated in an active photonic platform on 200-mm silicon wafers. The microcantilever-integrated photonic circuits miniaturize and simplify light projectors to enable versatile, power-efficient, and broadband laser scanner microchips.https://doi.org/10.1038/s41467-023-38260-8 |
| spellingShingle | Saeed Sharif Azadeh Jason C. C. Mak Hong Chen Xianshu Luo Fu-Der Chen Hongyao Chua Frank Weiss Christopher Alexiev Andrei Stalmashonak Youngho Jung John N. Straguzzi Guo-Qiang Lo Wesley D. Sacher Joyce K. S. Poon Microcantilever-integrated photonic circuits for broadband laser beam scanning Nature Communications |
| title | Microcantilever-integrated photonic circuits for broadband laser beam scanning |
| title_full | Microcantilever-integrated photonic circuits for broadband laser beam scanning |
| title_fullStr | Microcantilever-integrated photonic circuits for broadband laser beam scanning |
| title_full_unstemmed | Microcantilever-integrated photonic circuits for broadband laser beam scanning |
| title_short | Microcantilever-integrated photonic circuits for broadband laser beam scanning |
| title_sort | microcantilever integrated photonic circuits for broadband laser beam scanning |
| url | https://doi.org/10.1038/s41467-023-38260-8 |
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