Fabrication error analysis of nonperiodic-multilayer-dielectric gratings
We analyzed fabrication errors of nonperiodic-multilayer-dielectric gratings that were designed to have a high reflective diffraction efficiency for one wavelength and a high transmittance for another wavelength at the same time. Significant deviations were found between the measured and calculated...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2023-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_04031.pdf |