Applications of remote epitaxy and van der Waals epitaxy

Applications of remote epitaxy and van der Waals epitaxy

Abstract Epitaxy technology produces high-quality material building blocks that underpin various fields of applications. However, fundamental limitations exist for conventional epitaxy, such as the lattice matching constraints that have greatly narrowed down the choices of available epitaxial materi...

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Bibliographic Details
Main Authors: Ilpyo Roh, Seok Hyeon Goh, Yuan Meng, Justin S. Kim, Sangmoon Han, Zhihao Xu, Han Eol Lee, Yeongin Kim, Sang-Hoon Bae
Format: Article
Language:English
Published: SpringerOpen 2023-04-01
Series:Nano Convergence
Subjects:
Remote epitaxy
Van der Waals epitaxy
2DLT
Heterogeneous integration
Freestanding membrane
Online Access:https://doi.org/10.1186/s40580-023-00369-3

Internet

https://doi.org/10.1186/s40580-023-00369-3

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