Effects of Film Thickness of ALD-Deposited Al<sub>2</sub>O<sub>3</sub>, ZrO<sub>2</sub> and HfO<sub>2</sub> Nano-Layers on the Corrosion Resistance of Ti(N,O)-Coated Stainless Steel

Effects of Film Thickness of ALD-Deposited Al<sub>2</sub>O<sub>3</sub>, ZrO<sub>2</sub> and HfO<sub>2</sub> Nano-Layers on the Corrosion Resistance of Ti(N,O)-Coated Stainless Steel

The goal of this stydy was to explore the potential of the enhanced corrosion resistance of Ti(N,O) cathodic arc evaporation-coated 304L stainless steel using oxide nano-layers deposited by atomic layer deposition (ALD). In this study, we deposited Al<sub>2</sub>O<sub>3</sub>...

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Bibliographic Details
Main Authors: Mihaela Dinu, Kaiying Wang, Emile S. Massima Mouele, Anca C. Parau, Alina Vladescu (Dragomir), Xinhua Liang, Viorel Braic, Leslie Felicia Petrik, Mariana Braic
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Materials
Subjects:
atomic layer deposition
oxides
oxynitride
corrosion resistance
Online Access:https://www.mdpi.com/1996-1944/16/5/2007

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https://www.mdpi.com/1996-1944/16/5/2007

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