Analysis of Inductive Displacement Sensors with Large Range and Nanoscale Resolution
With the advantages of high resolution, structural simplicity, reliability, compact size, and high sensitivity, inductive sensors have been widely used in nanopositioning systems. However, the measuring range of traditional inductive sensors are usually limited to 0.2 mm. A novel analysis and design...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-10-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/21/10134 |