MEMS resonators with electrostatic actuation and piezoresistive readout for sensing applications
MEMS resonators based on internal thermal-piezoresistive amplification are a suitable alternative for sensing applications since they enable high resonance frequencies and high Q-factors. In this work, the principle of operation of this amplification mechanism is modeled, using analytical and lumped...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-08-01
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| Series: | Micro and Nano Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007222000557 |