Plasma characterization and morphological study for zirconium thin films deposited by DC magnetron sputtering at different powers
The electrical properties of zirconium thin films has been studied by Langmuir probe technique. The electron energy, electronic density, and ionic density of the samples were measured at low pressure with a varying power (60 to 160 W). Our results show that the energy of electrons decreases with in...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Isfahan University of Technology
2022-11-01
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| Series: | Iranian Journal of Physics Research |
| Subjects: | |
| Online Access: | https://ijpr.iut.ac.ir/article_3293_4132b5824d7987747a7a4a9f2698740e.pdf |