Ferroelectrics onto silicon prepared by chemical solution deposition methods: from the thin film to the self-assembled systems
The work of the authors during the last years on ferroelectric thin and ultra-thin films deposited by Chemical Solution Deposition (CSD) onto silicon based substrates is reviewed in this paper. Ferroelectric layers integrated with silicon substrates have potential use in the new micro/nanoelectronic...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2006-06-01
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| Series: | Boletín de la Sociedad Española de Cerámica y Vidrio |
| Subjects: | |
| Online Access: | http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/291/310 |