Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array

Abstract This paper presents the design, fabrication, and characterization of a middle-infrared (MIR) linear variable optical filter (LVOF) and thermopile detectors that will be used in a miniaturized mixed gas detector for CH4/CO2/CO measurement. The LVOF was designed as a tapered-cavity Fabry-Péro...

Full description

Bibliographic Details
Main Authors: Shaoda Zhang, Wu Bin, Binbin Xu, Xingyu Zheng, Binbin Chen, Xueqin Lv, Haisheng San, Werner Hofmann
Format: Article
Language:English
Published: SpringerOpen 2019-11-01
Series:Nanoscale Research Letters
Subjects:
Online Access:http://link.springer.com/article/10.1186/s11671-019-3176-7