Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array
Abstract This paper presents the design, fabrication, and characterization of a middle-infrared (MIR) linear variable optical filter (LVOF) and thermopile detectors that will be used in a miniaturized mixed gas detector for CH4/CO2/CO measurement. The LVOF was designed as a tapered-cavity Fabry-Péro...
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| Format: | Article |
| Language: | English |
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SpringerOpen
2019-11-01
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| Series: | Nanoscale Research Letters |
| Subjects: | |
| Online Access: | http://link.springer.com/article/10.1186/s11671-019-3176-7 |
| _version_ | 1797711012430872576 |
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| author | Shaoda Zhang Wu Bin Binbin Xu Xingyu Zheng Binbin Chen Xueqin Lv Haisheng San Werner Hofmann |
| author_facet | Shaoda Zhang Wu Bin Binbin Xu Xingyu Zheng Binbin Chen Xueqin Lv Haisheng San Werner Hofmann |
| author_sort | Shaoda Zhang |
| collection | DOAJ |
| description | Abstract This paper presents the design, fabrication, and characterization of a middle-infrared (MIR) linear variable optical filter (LVOF) and thermopile detectors that will be used in a miniaturized mixed gas detector for CH4/CO2/CO measurement. The LVOF was designed as a tapered-cavity Fabry-Pérot optical filter, which can transform the MIR continuous spectrum into multiple narrow band-pass spectra with peak wavelength in linear variation. Multi-layer dielectric structures were used to fabricate the Bragg reflectors on the both sides of tapered cavity as well as the antireflective film combined with the function of out-of-band rejection. The uncooled thermopile detectors were designed and fabricated as a multiple-thermocouple suspension structure using micro-electro-mechanical system technology. Experimentally, the LVOF exhibits a mean full-width-at-half-maximum of 400 nm and mean peak transmittance of 70% at the wavelength range of 2.3~5 μm. The thermopile detectors exhibit a responsivity of 146 μV/°C at the condition of room temperature. It is demonstrated that the detectors can achieve the quantification and identification of CH4/CO2/CO mixed gas. |
| first_indexed | 2024-03-12T07:00:47Z |
| format | Article |
| id | doaj.art-0fef55e73d1e444abd6147bc6a55a674 |
| institution | Directory Open Access Journal |
| issn | 1931-7573 1556-276X |
| language | English |
| last_indexed | 2024-03-12T07:00:47Z |
| publishDate | 2019-11-01 |
| publisher | SpringerOpen |
| record_format | Article |
| series | Nanoscale Research Letters |
| spelling | doaj.art-0fef55e73d1e444abd6147bc6a55a6742023-09-02T23:43:00ZengSpringerOpenNanoscale Research Letters1931-75731556-276X2019-11-011411910.1186/s11671-019-3176-7Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector arrayShaoda Zhang0Wu Bin1Binbin Xu2Xingyu Zheng3Binbin Chen4Xueqin Lv5Haisheng San6Werner Hofmann7Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityShenzhen MEMS-Frontier Electronics Co. Ltd.Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityShenzhen MEMS-Frontier Electronics Co. Ltd.Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityPen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityPen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityPen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityAbstract This paper presents the design, fabrication, and characterization of a middle-infrared (MIR) linear variable optical filter (LVOF) and thermopile detectors that will be used in a miniaturized mixed gas detector for CH4/CO2/CO measurement. The LVOF was designed as a tapered-cavity Fabry-Pérot optical filter, which can transform the MIR continuous spectrum into multiple narrow band-pass spectra with peak wavelength in linear variation. Multi-layer dielectric structures were used to fabricate the Bragg reflectors on the both sides of tapered cavity as well as the antireflective film combined with the function of out-of-band rejection. The uncooled thermopile detectors were designed and fabricated as a multiple-thermocouple suspension structure using micro-electro-mechanical system technology. Experimentally, the LVOF exhibits a mean full-width-at-half-maximum of 400 nm and mean peak transmittance of 70% at the wavelength range of 2.3~5 μm. The thermopile detectors exhibit a responsivity of 146 μV/°C at the condition of room temperature. It is demonstrated that the detectors can achieve the quantification and identification of CH4/CO2/CO mixed gas.http://link.springer.com/article/10.1186/s11671-019-3176-7Linear variable optical filterTapered cavityMulti-layer dielectricsThermopile detectorMixed gas detectors |
| spellingShingle | Shaoda Zhang Wu Bin Binbin Xu Xingyu Zheng Binbin Chen Xueqin Lv Haisheng San Werner Hofmann Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array Nanoscale Research Letters Linear variable optical filter Tapered cavity Multi-layer dielectrics Thermopile detector Mixed gas detectors |
| title | Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array |
| title_full | Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array |
| title_fullStr | Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array |
| title_full_unstemmed | Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array |
| title_short | Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array |
| title_sort | mixed gas ch4 co2 co detection based on linear variable optical filter and thermopile detector array |
| topic | Linear variable optical filter Tapered cavity Multi-layer dielectrics Thermopile detector Mixed gas detectors |
| url | http://link.springer.com/article/10.1186/s11671-019-3176-7 |
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