MEMS Resonant Cantilevers for High-Performance Thermogravimetric Analysis of Chemical Decomposition
We investigate the MEMS resonant cantilevers for high-performance thermogravimetric analysis (TGA) of chemical decomposition, featuring high accuracy and minimized thermal lag. Each resonant cantilever is integrated with a microheater for sample heating near the free end, which is thermally isolated...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-07-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/13/6147 |