Impact of film thickness in laser-induced periodic structures on amorphous Si films
Abstract We report self-organized periodic nanostructures on amorphous silicon thin films by femtosecond laser-induced oxidation. The dependence of structural periodicity on the thickness of silicon films and the substrate materials is investigated. The results reveal that when silicon film is 200 n...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer & Higher Education Press
2023-06-01
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| Series: | Frontiers of Optoelectronics |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/s12200-023-00071-6 |