Impact of film thickness in laser-induced periodic structures on amorphous Si films
Abstract We report self-organized periodic nanostructures on amorphous silicon thin films by femtosecond laser-induced oxidation. The dependence of structural periodicity on the thickness of silicon films and the substrate materials is investigated. The results reveal that when silicon film is 200 n...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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Springer & Higher Education Press
2023-06-01
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| Series: | Frontiers of Optoelectronics |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/s12200-023-00071-6 |
| _version_ | 1797795826144116736 |
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| author | Liye Xu Jiao Geng Liping Shi Weicheng Cui Min Qiu |
| author_facet | Liye Xu Jiao Geng Liping Shi Weicheng Cui Min Qiu |
| author_sort | Liye Xu |
| collection | DOAJ |
| description | Abstract We report self-organized periodic nanostructures on amorphous silicon thin films by femtosecond laser-induced oxidation. The dependence of structural periodicity on the thickness of silicon films and the substrate materials is investigated. The results reveal that when silicon film is 200 nm, the period of self-organized nanostructures is close to the laser wavelength and is insensitive to the substrates. In contrast, when the silicon film is 50 nm, the period of nanostructures is much shorter than the laser wavelength, and is dependent on the substrates. Furthermore, we demonstrate that, for the thick silicon films, quasi-cylindrical waves dominate the formation of periodic nanostructures, while for the thin silicon films, the formation originates from slab waveguide modes. Finite-difference time-domain method-based numerical simulations support the experimental discoveries. Graphical abstract |
| first_indexed | 2024-03-13T03:23:53Z |
| format | Article |
| id | doaj.art-1005c98780e94f53ba7cb75e1a4fe3b1 |
| institution | Directory Open Access Journal |
| issn | 2095-2767 |
| language | English |
| last_indexed | 2024-03-13T03:23:53Z |
| publishDate | 2023-06-01 |
| publisher | Springer & Higher Education Press |
| record_format | Article |
| series | Frontiers of Optoelectronics |
| spelling | doaj.art-1005c98780e94f53ba7cb75e1a4fe3b12023-06-25T11:09:07ZengSpringer & Higher Education PressFrontiers of Optoelectronics2095-27672023-06-011611810.1007/s12200-023-00071-6Impact of film thickness in laser-induced periodic structures on amorphous Si filmsLiye Xu0Jiao Geng1Liping Shi2Weicheng Cui3Min Qiu4College of Optical Science and Engineering, Zhejiang UniversityKey Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake UniversityKey Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake UniversityKey Laboratory of Coastal Environment and Resources of Zhejiang Province (KLaCER), School of Engineering, Westlake UniversityKey Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake UniversityAbstract We report self-organized periodic nanostructures on amorphous silicon thin films by femtosecond laser-induced oxidation. The dependence of structural periodicity on the thickness of silicon films and the substrate materials is investigated. The results reveal that when silicon film is 200 nm, the period of self-organized nanostructures is close to the laser wavelength and is insensitive to the substrates. In contrast, when the silicon film is 50 nm, the period of nanostructures is much shorter than the laser wavelength, and is dependent on the substrates. Furthermore, we demonstrate that, for the thick silicon films, quasi-cylindrical waves dominate the formation of periodic nanostructures, while for the thin silicon films, the formation originates from slab waveguide modes. Finite-difference time-domain method-based numerical simulations support the experimental discoveries. Graphical abstracthttps://doi.org/10.1007/s12200-023-00071-6Laser-induced periodic surface structures (LIPSS)Ultrafast optoelectronicsLaser nanofabricationQuasi-cylindrical waves |
| spellingShingle | Liye Xu Jiao Geng Liping Shi Weicheng Cui Min Qiu Impact of film thickness in laser-induced periodic structures on amorphous Si films Frontiers of Optoelectronics Laser-induced periodic surface structures (LIPSS) Ultrafast optoelectronics Laser nanofabrication Quasi-cylindrical waves |
| title | Impact of film thickness in laser-induced periodic structures on amorphous Si films |
| title_full | Impact of film thickness in laser-induced periodic structures on amorphous Si films |
| title_fullStr | Impact of film thickness in laser-induced periodic structures on amorphous Si films |
| title_full_unstemmed | Impact of film thickness in laser-induced periodic structures on amorphous Si films |
| title_short | Impact of film thickness in laser-induced periodic structures on amorphous Si films |
| title_sort | impact of film thickness in laser induced periodic structures on amorphous si films |
| topic | Laser-induced periodic surface structures (LIPSS) Ultrafast optoelectronics Laser nanofabrication Quasi-cylindrical waves |
| url | https://doi.org/10.1007/s12200-023-00071-6 |
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