RESIDUAL STRESS ANALYSIS OF UNCOOLED INFRARED FOCAL PLANE ARRAYS BY MICRO-RAMAN SPECTROSCOPY
The uncooled infrared focal plane arrays（ UIRFPA） used in this micro-Raman experiment are composed of Si O2 thin film and Si substrate. They have the characteristic of MEMS microstructure. The process of the thermal oxidation may lead to the residual stress on account of thermal ecpansion coefficien...
| Main Authors: | , |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Office of Journal of Mechanical Strength
2015-01-01
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| Series: | Jixie qiangdu |
| Subjects: | |
| Online Access: | http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2015.01.008 |