A Time-of-Flight Range Sensor Using Four-Tap Lock-In Pixels with High near Infrared Sensitivity for LiDAR Applications

A Time-of-Flight Range Sensor Using Four-Tap Lock-In Pixels with High near Infrared Sensitivity for LiDAR Applications

In this paper, a back-illuminated (BSI) time-of-flight (TOF) sensor using 0.2 µm silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) technology is developed for long-range laser imaging detection and ranging (LiDAR) application. A 200 µm-thick bulk silicon in...

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Bibliographic Details
Main Authors: Sanggwon Lee, Keita Yasutomi, Masato Morita, Hodaka Kawanishi, Shoji Kawahito
Format: Article
Language:English
Published: MDPI AG 2019-12-01
Series:Sensors
Subjects:
cmos image sensor
soi detector
backside-illumination
time-of-flight
lock-in pixel
Online Access:https://www.mdpi.com/1424-8220/20/1/116

Internet

https://www.mdpi.com/1424-8220/20/1/116

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